PEN/BADCy Interlayer Dielectric Films with Tunable Microstructures via an Assist of Temperature for Enhanced Frequency Stability

摘要

Low dielectric in terlayer films have become an important element to ensure the development of the microelectr onics industry.A kind of flexible interlayer dielectrics,polyarylene ether nitrile/bisphenol A cyanate ester(PEN/BADCy)film,with good thermal stability and low frequency dependence,has been developed by solution casting method.Herein,materials were designed to incorporate bisphenol A cyanate ester as a part of blend,contributing to the frequency stability and structural integrity.The morphological study combined with electron microscopy revealed the uniform and flexible microstructure information with controllable morphology through self-polymerization of cyanate esters with different prepolymerization time and curing temperatures.The dielectric films could present high thermal stability with Tg>180℃.Significant improvement in the dielectric properties was achieved for the dielectric constant and loss was much stabler than neat PEN over the frequency range from 100 Hz to 5 MHz.When the prepolymerization time was 3h and final curing temperature reached 230℃,the dielectric constant and dielectric loss of the films were 3.36 and 0.013 at 100 kHz,respectively.The dimensional stability(CTE=53.67×10^-6 K^-1)was confirmed and con sidered beneficial to use as an in terlayer dielectrics.