Modeling of Pulsed Direct-Current Glow Discharge

摘要

A self-consistent model was adopted to study the time evolution of low-voltagepulsed DC glow discharge. The distributions of electric field, ion density and electron density innitrogen were investigated in our simulation, and the temporal shape of the discharge current wasalso obtained. Our results show that the dynamic behaviors of the discharge depends strongly onthe applied pulse voltage, and the use of higher pulse voltages results in a significantly increaseof discharge current and a decrease of discharge delay time. The current-voltage characteristiccalculated by adjusting secondary electron emission coefficient for different applied pulse voltageunder the gas pressure of 1 Torr is found in a reasonable agreement with the experimental results.