Effect of Discharge Parameters on Properties of Diamond-Like Carbon Films Prepared by Dual-Frequency Capacitively Coupled Plasma Source

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• 来源
  《等离子体科学和技术（英文版）》 |2010年第1期|53-58|共6页
• 作者

  YANG Lei; XIN Yu; XU Haipeng; YU Yiqing; NING Zhaoyuan;

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• 作者单位

  Jiangsu Key Laboratory of Thin Films,School of Physical Science and Technology,Soochow University,Suzhou 215006,China;

  Jiangsu Key Laboratory of Thin Films,School of Physical Science and Technology,Soochow University,Suzhou 215006,China;

  Jiangsu Key Laboratory of Thin Films,School of Physical Science and Technology,Soochow University,Suzhou 215006,China;

  Jiangsu Key Laboratory of Thin Films,School of Physical Science and Technology,Soochow University,Suzhou 215006,China;

  Jiangsu Key Laboratory of Thin Films,School of Physical Science and Technology,Soochow University,Suzhou 215006,China;

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