Experimental Study on RF Hollow Cathode Discharge

摘要

By using a longitudinal static magnetic field, we have shown that it is possible to excite an intensive plasma in a simple stainless steel tube which is connected with a RF power supply. Under certain conditions, the very bright Ar Ⅱ lines were excited. The emission intensities of Ar Ⅱ lines were increased with the increase in RF power, magnetic field, and the decrease in argon pressure. As the plasma-sheath boundary oscillating under the RF voltage, the plasma column is periodically compressed by the oscillating boundary.``