Ion Density Distribution in an Inductively Coupled Plasma Chamber

摘要

The ion density distribution in the reaction chamber was diagnosed by a Langmuir probe. The rules of the ion density distribution were obtained under the pressures of 9 Pa, 13 Pa,27 Pa and 53 Pa in the reaction chamber, different radio-frequency powers and different positions.The result indicates that the ion density decreases as the pressure increases, and increases as the power decreases. The ion density of axial position z = 0 achieves 5.8×10 10 on the center of coil under the power of 200 w and pressure of 9 Pa in the reaction chamber.