Observation of the Emission Spectra of an Atmospheric Pressure Radio-frequency Plasma Jet

摘要

An atmospheric pressure plasma jet (APPJ) using radio-frequency (13.56 MHz)power has been developed to produce homogeneous glow discharge at low temperature. With optical emission spectroscopy, we observed the excited species (atomic helium, atomic oxygen and metastable oxygen) generated in this APPJ and their dependence on gas composition ratio and RF power. O and O2(b1∑g+) are found in the effluent outside the jet by measuring the emission spectra of effluent perpendicular to the jet. An interesting phenomenon is found that there is an abnormal increase of O emission intensity (777.4 nm) between 10 mm and 40 mm away from the nozzle. This observation result is very helpful in practical operation.