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Growth of Free-Standing Diamond Films on Stainless Steel

机译:不锈钢上自由站立式金刚石膜的生长

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摘要

Free-standing diamond films have been successfully deposited on stainless steel substrates using microwave plasma-assisted chemical vapor deposition. Although iron, which is the main element of stainless steel, is known to inhibit the nucleation of diamond and enhance the formation of graphite, we were able to grow relatively thick films (~ 1.2 mm). The films were easily detachable from the substrates. The poor adhesion made it possible to obtain free-standing diamond films without chemical etching. Raman spectroscopy showed the 1332 cm-1 characteristic Raman peak of diamond and the 1580 cm-1, 1350 cm-1 bands of graphite on the growth surface and backside of the films, respectively. By energy dispersive X-ray spectroscopy it was only possible to detect iron on the back of the films, but not on the surface. The role of iron in the film growth is discussed.
机译:使用微波等离子体辅助化学气相沉积已成功地将自支撑金刚石膜沉积在不锈钢基底上。尽管铁是不锈钢的主要元素,但众所周知它抑制了金刚石的形核并增强了石墨的形成,但我们仍能够生长相对较厚的膜(约1.2毫米)。膜易于从基材上分离。差的粘合性使得无需化学蚀刻即可获得独立的金刚石膜。拉曼光谱表明,薄膜的生长表面和背面分别具有1332 cm-1的特征性金刚石拉曼峰和1580 cm-1、1350 cm-1的石墨带。通过能量色散X射线光谱法只能检测薄膜背面的铁,而不能检测表面的铁。讨论了铁在膜生长中的作用。

著录项

  • 来源
    《等离子体科学和技术(英文版)》 |2005年第4期|2950-2952|共3页
  • 作者单位

    Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China;

    Department of Materials Science and Engineering, Wuhan Institute of Chemical Technology, Wuhan 430073, China;

    Department of Materials Science and Engineering, Wuhan Institute of Chemical Technology, Wuhan 430073, China;

    Department of Materials Science and Engineering, Wuhan Institute of Chemical Technology, Wuhan 430073, China;

    Department of Orthodontics, School of Stomatology, the Fourth Military Medical University, Xi'an 710023, China;

  • 收录信息 中国科学引文数据库(CSCD);
  • 原文格式 PDF
  • 正文语种 chi
  • 中图分类 TL612;
  • 关键词

    microwave plasma; chemical vapor deposition; free-standing diamond film; stainless steel;

    机译:微波等离子体;化学气相沉积;自支撑金刚石膜;不锈钢;
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