Sheath Structures of Strongly Electronegative Plasmas

摘要

The sheath structures of strongly electronegative plasmas are investigated on basis of the accurate Bohm criterion obtained by Sagdeev potential. It is found that the presheath transition between the bulk plasma and the sheath almost does not exist there, and that distributions of electrons, negative and positive ions in the sheath form a pure positive ion sheath near the boundary of the electrode. Furthermore, the density distribution of space net charge has a peak near the sheath edge, the spatial potential within the sheath falls faster, and the sheath thickness becomes thinner.