Simulation of Capacitively Coupled Dual-Frequency N2, O2, N2/O2Discharges: Effects of External Parameters on Plasma Characteristics

著录项

• 来源
  《等离子体科学和技术（英文版）》 |2014年第4期|335-343|共9页
• 作者

  YOU Zuowei; DAI Zhongling; WANG Younian;

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• 作者单位

  School of Physics and Optoelectronic Technology, Dalian University of Technology,Dalian 116023, China;

  School of Physics and Optoelectronic Technology, Dalian University of Technology,Dalian 116023, China;

  School of Physics and Optoelectronic Technology, Dalian University of Technology,Dalian 116023, China;

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• 收录信息 中国科学引文数据库(CSCD);
• 原文格式 PDF
• 正文语种 eng
• 中图分类
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