Mechanical Properties and Uniformity of Nanocrystalline Diamond Coating Deposited Around a Sphere by MPCVD

摘要

Nanocrystalline diamond coatings were deposited by MPCVD on the spheres used for a ball bearing.The nanocrystalline coatings with a grain size of 50 nm were confirmed by the surface morphology and composition analysis.The hardness of the coating is 20-40 GPa tested by nanoindentation,which is higher than that of tungsten carbide and silicon nitride substrates.The coating around the sphere observed from the Micro CT images is uniform with a thickness of12 μm.