Miniaturized Argon Plasma: Neutral Gas Characteristics in Dielectric Barrier Discharge

摘要

Plasma-neutral gas dynamics is computationally investigated in a miniaturized microthruster that encloses Ar and contains dielectric material sandwiched between two metal plates using a two-dimensional plasma mode. Spatial and temporal plasma properties are investigated by solving the Poisson equation with the conservation equations of charged and excited neutral plasma species using the COMSOL Multiphysics 4.2b. The microthruster property is found to depend on the secondary electron emission coefficient. The electrohydrodynamic force(EHD) is calculated and found to be significant in the sheath area near the dielectric layer and is found to affect gas flow dynamics including the Ar excimer formation and density. The effects of pressure and secondary emission coefficient are discussed. The plasma characteristics are affected by small changes in the secondary electron emission coefficient, which could result from the dielectric erosion and aging, and is found to affect the electrohydrodynamic force produced when the microthruster is used to produce thrust for a small spacecraft.