High power impulse magnetron sputtering and its applications

摘要

High power impulse magnetron sputtering (HiPIMS) has attracted a great deal of attention because the sputtered material is highly ionized during the coating process,which has been demonstrated to be advantageous for better quality coating.Therefore,the mechanism of the HiPIMS technique has recently been investigated.In this paper,the current knowledge of HiPIMS is described.We focus on the mechanical properties of the deposited thin film in the latest applications,including hard coatings,adhesion enhancement,tribological performance,and corrosion protection layers.A description of the electrical,optical,photocatalytic,and functional coating applications are presented.The prospects for HiPIMS are also discussed in this work.