机译:用于高阻隔层制造的非热等离子体技术的最新进展
Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 102600,People's Republic of China;
Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 102600,People's Republic of China;
Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 102600,People's Republic of China;
Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 102600,People's Republic of China;
Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 102600,People's Republic of China;
Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 102600,People's Republic of China;