Deposition of SiO_x on Metal Surface with a DBD Plasma Gun at Atmospheric Pressure for Corrosion Prevention

摘要

In this study,SiO_x films were deposited by a dielectric barrier discharge(DBD)plasma gun at an atmospheric pressure.The relationship of the film structures with plasmapowers was investigated by Fourier transform infrared spectroscopy(FTIR),and scanning electronmicroscope(SEM).It was shown that an uniform and cross-linking structure film was formed bythe DBD gun.As an application,the SiO_x films were deposited on a carbon steel surface forthe anti-corrosion purpose.The experiment was carried out in a 0.1 M NaC1 solution.It wasfound that a very good anti-corrosive property was obtained,i.e.,the corrosion rate was decreasedc.a.15 times in 5% NaCl solution compared to the non-SiO_x coated steel,as detected by thepotentiodynamic polarization measurement.