机译：微波功率对ECR等离子增强直流磁控溅射制备的类金刚石氢化碳膜性能的影响
Applied;
Low;
Temperature;
Plasma;
Laboratory,;
Shenzhen;
Key;
Laboratory;
of;
Sensors;
T（？ch-nology,;
School;
of;
Physics,;
Shenzhen;
University,;
Shenzhen;
518060,;
China;
ECR等离子体; 类金刚石薄膜; 微波功率; 磁控溅射; 制备性能; 等离子体应用; DLC薄膜; DC;
