Memory;
Business;
Division,;
Fujitsu;
Semiconductor;
Limited,;
Kohoku-ku,;
Yokoham;
222-0033,;
Japan;
Engineering;
Laboratory,;
Fujitsu;
Laboratories;
Limited,;
10-1;
Morinosato-Wakamiya,;
A;
tsugi,;
Kanag;
awa;
243-0197,;
Japan;
铁电存储器; FRAM; 批量生产; 铁电随机存取存储器; 铁电电容器; 制造技术; 结晶质量; 高温沉积;