机译:考虑振动的非球面超精密磨削(UPG)的基于传感器的检查精度
School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou, 350116, China;
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130022, China;
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130022, China;