A novel resonant cavity enhanced photodetector with flattop and steep-edge response

摘要

A novel resonant cavity enhanced(RCE) photodetector with flat-top and steep-edge response is presented.The response is obtained by designing a gradient-thickness P area in the absorption cavity.Simulation results show that the maximum and minimum values of the quantum efficiency in bandpass are 85.242% and 87.564% respectively,the ripple is about 3.6%,and 0.5 dB,3 dB and 20 dB bandwidths are 0.3 nm,0.4 nm and 1.2 nm,respectively.The mesa area is 10 μm×10 μm and the frequency response bandwidth is 87 GHz.Compared with similar photodetectors,this photodetector has high quantum efficiency,narrow spectral response linewidth,good flat-top and steep-edge response and ideal high-speed characteristics.