多维精密光学调整架坐标解耦合分析

摘要

In optical alignment, because quantizing and compensating of the coupling relation keeps a problem, the coordinates coupling is usually ignored, resulting in adjusting error in accurate optical adjusting. Through modeling and simulation, the coupling relation of each adjusting freedom of a multidimensional precision optical adjusting frame is analyzed in detail. Through decomposed transformation of each adjusting freedom, the coupling relation between each adjusting freedom is compensated and corrected. Test result shows that: by using this method, the error between expected optical adjusting value and actual mechanical adjusting value can be reduced effectively, and more accurate optical adjusting is achieved.%由于无法对调整架各维调节自由度之间的坐标耦合关系进行量化和补偿校正,一般在光学系统装调中通常忽略坐标耦合情况,造成光学调整的误差.本文通过数学建模与仿真,详细分析了多维精密光学调整架各维运动自由度之间的耦合关系,对多维光学调整架的各维调整量进行分解变换,对各维调整量之间的坐标耦合进行了补偿校正,测试结果表明,该方法可以有效减小实际机械调整量和期望的光学调整量之间存在差异,从而实现更加准确的光学调整.