To realize the ultra-precision measurement for tip arc waviness of diamond tools ,an arc pro-file measurement system based on an atomic force microscopy and an ultra-precision spindle was estab-lished .The evaluation method of tool tip arc waviness and the scheme to control measuring error were investigated .Firstly ,the selection principle of waviness cut-off wavelength was proposed in the arc waviness evaluation and the flowchart of tool tip arc waviness measurement was presented .Then ,the measurement and evaluation for radial rotation errors of the ultra-precision spindle were discussed ,the control for mounting errors of eccentric and declination angles and the calibration for nonlinear error of atomic force scan system were described .Finally ,the tip arc waviness of a diamond tool was measured by self-developed ultra-precision profile measurement system ,and the measurement accuracy and un-certainty were analyzed .Experimental results show that the tip arc waviness of diamond tools can be accurately described by proposed method ,the waviness is 0 .106 μm ,and the uncertainty is 23 .8 nm . These results satisfy the system requirements for higher precision and stabilization .%为实现金刚石刀具刀尖圆弧波纹度超精密测量,构建了基于原子力显微镜(AFM)和精密回转轴系的刀尖圆弧轮廓测量系统,研究了刀尖圆弧波纹度评价方法和控制测量系统引入误差的策略.提出了评价刀尖圆弧波纹度时截止波长的确定原则和方法,并介绍了刀尖圆弧波纹度测量原理及评价流程.讨论了精密回转轴系径向回转误差的测量和评定、刀具安装偏心和偏角误差的控制和原子力扫描系统Z向非线性误差的校准方法.最后,在构建的测量系统上测量了了金刚石刀具刀尖圆弧波纹度并对测量不确定度进行了分析.实验测量显示:所评价金刚石刀具的刀尖圆弧波纹度为0.106μm,测量不确定度为23.8 nm,表明所构建的测量系统基本满足金刚石刀具刀尖圆弧波纹度纳米级测量及评价的需求,测量结果稳定可靠、精度高.
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