氮化铟可调谐导模共振滤波器的仿真研究

摘要

基于严格耦合波理论和等效介质理论,仿真分析了1258～1335nm波段的氮化铟亚波长凸型光栅导模共振滤波器.利用仿真结果讨论了占空比、光栅深度和入射角度对滤波器导模共振效应的影响.结合入射角度影响反射的特性,利用光栅与平板电容致动器集成制作了可调滤波器.入射角度θ变化O°～11.73°,其半高线宽(FWHM)不高于1nm,实现了78nm的可调谐范围.%According to the rigorous coupled wave theory and equivalent medium theory,a InN-based sub-wavelength convex grating guided mode resonance filter was simulated and ananlyzed,and the wave band of the filter was from 1258nm to 1335nm.What is more,the influence of duty ratio,grating depth and incidence angle on guided-mode resonances effects was discussed based on the simulation results.It was proposed to design and make an angle-tunable filter by integrating grating and flat capacitance actuator based on the sensitivity of the incidence angle.The simulation results show that when the incident angle was changed from 0°～11.73°,the FWHM was less than lnm and the tunable range was 78nm.