射频/直流磁控溅射不锈钢/Al2O3复合薄膜组织与性能研究

摘要

利用射频/直流磁控溅射法，制备了316L不锈钢/Al2O3陶瓷复合薄膜，研究了316L不锈钢/Al2O3陶瓷复合膜的组织形貌，测试了薄膜的显微硬度和耐磨性。结果表明：直流磁控溅射316L不锈钢薄膜呈柱状晶结构，主要有Fe-Cr和γ-Fe相构成，在Fe-Cr(110)晶面出现明显的择优取向；由于射频溅射Al2O3陶瓷的掺合，使316L不锈钢/Al2O3陶瓷复合薄膜柱状晶细化，并出现二次柱状晶，在Fe-Cr(211)晶面出现明显的择优取向，316L不锈钢膜硬度明显高于316L块体，掺合了Al2O3的金属/陶瓷复合薄膜耐磨性有显著的提高。%In this paper,the 316L stainless steel /Al2O3 ceramic composite film was prepared by RF/DC sputtering,Microstructure and properties of 316L stainless steel/Al2O3 ceramic composite film were investigated.The results showed that the cture column crystal microstru of the 316L stainless steel prepared by magnetron sputtering was formed with Fe-Cr phase and γ-Fe phase,and(110) orientation of Fe-Cr phase had priority.The phase orientation of 316L stainless steal film with trace of Al2O3 ceramic addition turned to (211) orientation,while wear resistance improved greatly,but the hardness slightly.