Stressed carbon nanotube devices for high tunability,high quality factor, single mode GHz resonators

摘要

The emerging applications of nanoelectromechanical systems (NEMS) in ground-state cooling,quantum manipulation,communication devices,etc.,call for a nanoresonator with high frequency,quality factor,and tunability,as well as easy integration.Here we show that such a nanoresonator can be achieved by using a unique assembly technique that transfers the stressed inner shell of carbon nanotubes (CNTs) to a self-aligned device geometry.The as-fabricated nanoresonator shows excellent comprehensive performance,i.e.,high frequency (2-3 GHz),high tunability (80-110 MHz/V),high quality factor (3 × 104),and single mode operation.The defect-free nature of the inner shell of the CNT gives rise to a high quality factor,and the preloaded tension improves the resonant frequency and tunability.This resonator with excellent performance also enables the integration of homogeneous devices and will play a key role in the emerging applications of NEMS.