机译:垂直转印半导体阵列的高精度转印和集成,可用于柔性器件制造
for;
Nano;
and;
Micro;
Manufacturing;
and;
Department;
of;
Electrical;
and;
Computer;
Engineering,;
University;
of;
California,;
Davis,;
CA;
95616,;
USA;
of;
Physics,;
University;
of;
California,;
Davis,;
CA;
95515,;
USA;
National;
Laboratories,;
Livermore,;
CA;
94551,;
USA;
Device;
Science;
Laboratory,;
Nara;
Institute;
of;
Science;
and;
Technology,;
Japan;
半导体材料; 垂直阵列; 柔性基板; 制造工艺; 印刷方法; 高精度; 转印; 触觉传感器;