航天用SiC反射镜超声振动辅助磨削工艺研究

摘要

针对航天用SiC反射镜的低加工效率、表面质量差等难题,采用超声振动辅助磨削技术对其进行工艺实验研究.首先,通过选用树脂结合剂金刚石杯型砂轮并采取栅线式磨削研究不同工艺参数对磨削效率的影响关系.然后采取螺旋式磨削进行正交实验探究超声振幅、进给速度、砂轮转速、磨削深度对表面粗糙度的影响,并采用极差法分析探究各因素对工件磨削质量影响程度的大小.研究结果表明:当超声振幅5μm,进给速度80mm/min,砂轮转速6000r/min,磨削深度2μm时可获得表面粗糙度Ra97nm的已加工表面.%Aiming at low machining efficiency,bad surface quality and other defects of astronautic SiC mirror, experimental research were carried out by ultrasonic assisted grinding technique.First,through choosing resin bond diamond cup grinding wheel,influence relation between different process parameters and the grinding efficiency was studied by using grid line grinding.Then,by using auger-type grinding,orthogonal experiment were carried out in order to research the influence of surface roughness about ultrasonic amplitude、feed speed、wheel speed、grinding depth.And used range analysis to study the impact of various factors on the size of the prototype grinding quality.Studies show that the machined surface roughness of Ra97nm is obtained with the ultrasonic amplitude of 5μm, the feed speed of 80mm/min,the wheel speed of 6000r/min,and the grinding depth of 2 μm.