300mm IC的自动物料搬运系统电气控制系统设计与实现

摘要

In Integrated Circuit (IC) industry, Automatic Material Handling System (AMHS) improved the production rate and shortened the production cycle effectively.Therefore, it was of great significance to design the AMHS.By analyzing the functional requirement of control system, the total scheme of electric control was proposed.The power supply scheme was designed especially for the contactless power system, and the electric control scheme of key equipments was designed.Through analyzing the technical index of actual equipment, it was shown that the reliability of 300mm AMHS was satisfied.%在集成电路(Integrated Circuit, IC)制造行业中,自动物料搬运系统(Automatic Material Handling System, AMHS)有效地提高了生产速度、缩短了生产周期,因此设计AMHS具有重要意义.文章分析了AMHS控制功能要求,确定了电气控制总体方案,进行了系统供配电方案设计,尤其是非接触供电,设计了关键设备的电气控制系统方案.通过分析实际装置的技术指标,表明所设计的300mm AMHS满足要求.