精密微调器实现二轴联动系统精度增长的研究

摘要

The effect of improvement of controlling system and optimal design of friction pairs on precision growth of advanced two-axis linkage system is limited in some extent.In this paper,a precise fine-adjustor is introduced to realize the functional compound with the existing two-axis linkage system.The precision in small-range motion can be increased by several times without interference in the reliability and performance of wide-range motion of the existing system.The piezoelectric fine-adjustor is proposed to realize the growth in angular precision of horizontalaxis linkage system.The electromagnetic fluid type fine-adjustor is proposed to realize the growth in displacement precision of vertical-axis linkage system.The operational principles and working effects of these two fine-adjustors are analyzed.Experiments and analysis indicate that the proposed precision growth method can satisfy the anticipated engineering requirements.%控制系统的改进和摩擦副优化设计对先进二轴联动系统精度的提升效果有限.提出通过引入精密微调器与已有的二轴系统实现功能并联,在不干扰已有系统可靠性和大范围运动功能的前提下,实现小范围内运动精度的成倍增长.针对两轴垂直和两轴平行的两类二轴联动系统,分别提出了压电晶体型角度微调器以实现角度精度的增长、电磁液型位移微调器以实现位移精度的增长,分析了它们的工作原理和作用效果.结果表明,提出的精度增长方法能够满足工程预期目标.