Technical;
University;
of;
Ukraine;
"Kiev;
Polytechnic;
Institute";
Kiev;
03035,;
Ukraine;
Department;
(High-Precision;
Mechanics),;
NTUU;
"KPI",;
Kiev;
03056,;
Ukraine;
Bases;
of;
Radio;
Engineering;
Department,;
NTUU;
"KPI",;
Kiev;
03056,;
Ukraine;
MEMS结构; 微机电系统; 模拟移相器; 计算机模拟技术; 尺寸设计; 自动切换; 微波工作室; 优化技术;