软磁金属薄膜面内单轴磁各向异性与微波性能调控

摘要

随着信息技术的快速发展,应用于该领域的高频软磁材料成为当前研究的热点之一.相比传统块体材料与微波铁氧体材料,软磁金属薄膜有望在高频条件下实现高磁导率,同时实现轻质化、薄型化等技术要求,具有广阔的应用前景,因而受到磁性材料和微波器件研究领域的一致关注.面对微波集成应用技术向更高频率发展的重大需求,提高材料的面内单轴各向异性是该领域研究的核心内容.分别针对感生各向异性、形状各向异性、磁弹(应力)各向异性、交换各向异性、磁晶各向异性等不同类别,综述软磁金属薄膜面内单轴磁各向异性与微波性能调控方面的进展.%With the rapid development of information technology,the high frequency soft magnetic materials have become one of the hot research areas.Compared with the traditional bulk materials and microwave ferrite materials,the soft magnetic metallic thin films are expected to meet the technical requirements of high-performance,being lighter and thinner at the same time,and show great potentials in applications.Therefore,they attract much attention from the area of magnetic materials and microwave devices.Facing the development of integrated microwave technology toward higher frequency,to improve the in-plane uniaxial magnetic anisotropy is the key in this field.This paper summarizes the developments of the tuning of inplane uniaxial magnetic anisotropy and microwave magnetic properties in soft magnetic metallic thin films,according to different kinds of anisotropies,including induced anisotropy,shape anisotropy,magnetoelastic anisotropy,exchange anisotropy,magnetocrystalline anisotropy,and so on.