时栅式直驱转台位置反馈智能接口设计

摘要

The dynamic position feedback error of direct drive rotary table based on time grating sensor was analyzed. Time grating sensor's absolute discrete angle measuring values was transformed into incremental continuous pulse signal by using prediction measuring method. Position feedback and control intelligent interface circuit of direct drive rotary table based on time grating sensor was developed, from which a-chieved space location prediction measurement . Through dynamic prediction experiment, direct drive rotary tables' dynamic prediction error is ±4". That means time grating sensor can meet direct drive rotary tables' high-precision requirements.%分析时栅式直驱转台位置反馈存在的动态位置反馈误差.提出利用预测测量方法,将时栅绝对式离散角度测量值转化为增量式连续脉冲信号.研制时栅式直驱转台位置反馈与控制智能接口电路,实现空间位置预测测量.开展预测实验,测得直驱转台空间位置的动态预测误差为±4”,表明时栅可以满足直驱转台高精度的要求.