基于光谱共焦位移传感器的非接触式回转误差测量系统

摘要

A new type of non contact system for measurement of rotating error based on confocal chromatic displacement sensor with reversal method was designed for measuring rotating error of rotary axis system with the value of approximated 50 nm.The difference between the measurement value and the nominal value is less than 5 nm,which is shown by study that the system meets the requirement for design.%为了实现50 nm左右回转误差测量,设计了一种新型非接触式测量系统,该系统采用光谱共焦位移传感器,通过反向法获得回转轴系径向回转误差、标准球圆度误差.标准球圆度误差测量值与标称值的最大差值为5nm,表明该测量系统的测量精度能够满足设计要求.