基于ANSYS的卡盘夹紧力传感器尺寸优化设计

摘要

The optimal design of hexagonal chuck clamping force sensor size was realized by using ANSYS,which improved the sensitivity of the sensor.A reasonable diameter ratio between the inner circle and the inscribed circle was obtained,to make the tensile and compressive strain value,measured by the resistance strain gauges,maximize and close to each other.The influence of the centrif-ugal force on the sensor itself was determined in the case of high-speed rotation.The results show that the size optimization based on ANSYS optimization function is convenient and feasible.It provides a new method for the design and analysis of chuck clamping force sensor.%运用ANSYS软件，对六角形卡盘夹紧力传感器的尺寸进行优化设计，提高了传感器的灵敏度，得到了合理的内圆直径和内切圆直径比，满足拉压电阻应变片测量值输出最大化且接近；明确了高速旋转情况下离心力对传感器自身的影响大小。结果表明：利用ANSYS的优化分析功能进行尺寸的优化是方便、可行的，为卡盘夹紧力传感器的设计分析提供了新的方法。