高纯氟甲烷中杂质含量色谱分析

摘要

High purity fluorine, a new type of fluorine containing electronic gas, is a non-toxic, colorless, odorless, com-bustible liquid gas. It is stored in cylinders at room temperature. Fluorine methane as a etching gas is very strict in purity. It often needs more than 99.99% or even 99.999%. A high sensitive helium ionization discharge detector (DID) and high efficient chromatographic column system were used to analyze content of the impurities in high purity fluoro methane.%高纯氟甲烷作为新型的含氟电子气体,常温下是一种无毒、无色、无嗅、可燃的存储在钢瓶中的液化气体.一氟甲烷作为刻蚀气体对纯度要求甚为严格,往往需要大于99.99% ,甚至99.999% .探讨了高纯氟甲烷的杂质含量分析方法,采用高灵敏度的氦离子化放电检测器(DID),高效的色谱柱系统,实现了对其中杂质含量的分析.