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Peng-cheng HU; Di CHANG; Jiu-bin TAN; Rui-tao YANG; Hong-xing YANG; Hai-jin FU;
Center of Ultra-precision Optoelectronic Instrument Engineering Harbin Institute of Technology Harbin 150080 China;
Key Lab of Ultra-precision Intelligent Instrumentation Ministry of Industry and Information Technology Harbin 150080 China;
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