Jiangsu;
Key;
Laboratory;
of;
Center;
for;
Photon;
Manufacturing;
Science;
and;
Technology,;
Jiangsu;
University,;
Zhenjiang;
212013,;
China;
School;
of;
Automobile;
and;
Traffic;
Engineering,;
Jiangsu;
University,;
Zhenjiang;
212013,;
China;
热化学气相沉积; 碳纳米管阵列; 透射电子显微镜分析; 合成; 催化剂层; 生长性能; 高分辨率; Si衬底;