of;
Physics;
and;
Technology,;
Wuhan;
University,;
Wuhan;
430072,-China;
Institute;
of;
Electro-Optics-Wuhan;
National;
Laboratory;
for;
Optoelectronics,;
Wuhan;
430074,;
China;
of;
Electrical;
&;
Electronic;
Engineer,;
Hubei;
University;
of;
Technology,;
Wuhan;
430068,;
China;
TiO2薄膜; 退火温度; 迁地保护; TEM; 直流反应磁控溅射; 透射电子显微镜; 二氧化钛膜; 表面粗糙度;