硅微陀螺仪零偏温度性能补控方法设计

摘要

First, the relations between temperature and the resonant frequency, quality factor, sensing signal output, and mechanical thermal noise of silicon micro-gyro are theoretically deduced to further demonstrate that the effect on ZRO (zero rate output) of micro-gyro is a combined result of these nonlinear factors. Then, through partial temperature dependency test, the relationship curves of the resonant frequency and quality factor over temperature in two modes are derived. Finally, according to the real ZRO measurements, the polynominal term fitting method is presented and then the hybrid method combined with constant temperature control is intensively investigated to better the conforming compensation effect, which can make sure that the wafer die and circuitry are immune to the ambient temperature. The experimental results demonstrate that the temperature compensation and control system designed can effectively improve the zero bias stability of the micro-gyro.%首先从理论上推导了硅微陀螺仪谐振频率、品质因数、敏感信号输出及机械热噪声与温度之间的关系,进而说明了温度对陀螺仪零偏输出影响是各非线性因素综合作用的结果.然后,通过部分温度特性试验获得了硅微陀螺仪的模态谐振频率和品质因数随温度变化关系曲线.最后,根据实测零偏试验数据给出了分段多项式温度补偿方法,并进一步结合恒温控制方法改善补偿一致性效果,从而保证硅微陀螺仪硅结构体及其驱动检测电路不受外界温度变化的影响.结果表明,温补和温控技术相结合对提高陀螺仪的零偏稳定性有显著效果.