低气压放电中的弧光放电发展及其抑制方法

摘要

The development of arc-discharge was studied under the condition of high frequency pulse discharge. The result is obtained that the capability to restrain arc-discharge becomes better while pulse frequency of the power supply raise ,and that fast arc-discharge detecting and circuit protecting is needed. Some valid bases are given for the design of high frequency plasma pulse power supply.%在高频直流脉冲放电的条件下，对低气压放电过程中存在的弧光放电的发展过程进行了研究，揭示了脉冲放电频率的提高对抑制弧光放电的发展是有效的，而快速的弧光放电检测和保护电路是不可缺少的.为一种新型等离子体高频激励电源的研制提供了有效的依据.