激光双光束干涉制备ZnO表面亚微米孔阵列结构

摘要

利用飞秒激光双光束干涉技术,在ZnO晶体表面制备亚微米孔阵列结构.该结构由微米光栅结构和亚微米孔组成.其中,微米光栅结构由双光束干涉的光强分布决定.亚微米孔由激光诱导长周期条纹演化而成,双光束干涉对光强的局域在形成过程中起了重要的作用.调节照射激光波长能够制备不同尺寸的纳米孔阵列,在激光纳米加工中具有潜在的应用价值.%A submicro-hole array is fabricated using interference between two femtosecond laser beams on a ZnO surface.The submicro-hole array is composed of a micro-grating structure and submicro-holes.The micro-grating structure is determined by the intensity pattern of the two-beam interference.The submicro-holes are a result of growth of laser-induced long periodic ripples, in which the two-beam interference plays an important role.Nanohole arrays with different sizes can be fabricated by adjusting the laser wavelength.They have potential applications in the field of femtosecond laser nanofabrication.