Ta and C ions extracted from a MEVVA ion source were implanted into Cr12 steel, with an implantation dose of (1-5)ｘ1017cm-2, extraction acceleration 42kV, and average ion beam flux about 20-50μA·cm-2. Rutherford backscattering spectrum (RBS) was used to measure the surface composition after Ta and Ta+C implantation. Analysis of phase formed by Ta and C implantation was carried out by X-ray diffraction analysis (XRD). Experiment results showed that the wear rate of the implanted layer dropped 40% for Ta ion implantation and by a factor of 2.7 for Ta+C dual ion implantation. Ta+C dual ion implantation was found to reduce the friction coefficient of Cr12 steel. The wear mechanisms of the implanted layer were discussed.
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