光纤湿敏球腔传感采集校准组合装置的技术问题初探

摘要

Humidity sensitive monitoring device with optical fiber coupling was developed in this paper.This device adopts the MEMS micro displacement sensor aided calibration for humidity sensitive micro-cavity coupling location,and the light intensity sensor is used for humidity output quantization.Comparing with other docking calibration platform,this kind of MEMS displacement sensor based coupling position calibration method needs not any huge instrument device,can obtain precise and convenient calibration results.In the sensor system back-end programmable control procedures can be developed,with the loading of data acquisition card to realize the humidity sensitive unit quantity acquisition and display.%本文研制了一种光纤耦合湿敏监测装置,此装置采用MEMS微位移传感器来进行湿敏微腔耦合位置的辅助校准,再用光强传感器对耦合输出的光波进行湿度感测和量化.这种基于MEMS位移传感器的耦合位置校准方法与现有的校准平台相比,无需外加太多繁琐、庞大的仪器装置,就可获得精准又便捷的校准效果.另外在传感系统后端可进行可编程控制程序开发,用加载的数据采集卡来实现湿度敏感单元敏感量的采集与显示.