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Preparation of 3 Inch Double-Sided YBa2Cu3O7-X High Temperature Superconducting Thin Films

         

摘要

@@ Owing to its excellent electrical property,YBCO thin film is much better than metal in the application for microwave devices. It makes the devices smaller, lighter, and with higher quality factor and lower insertion loss. YBCO thin film has attracted attentions for many years. Aiming at the uniformity and property of 3-inch double-sided YBCO thin film, the following aspects is considered in this dissertation:

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