微机电系统微弹簧优化设计方法

摘要

针对现有微机电系统(MEMS )微弹簧研究中侧重于弹性系数的分析，微弹簧优化设计研究则不足的情况，提出了微机电系统微弹簧优化设计方法。该方法根据 MEMS工艺易于平面图形加工的优势，采用 Matlab软件的fgoalattain函数对“L”型微弹簧的线宽进行优化设计，以降低“L”型微弹簧的最大应力。仿真验证表明：在保证微弹簧相同尺寸和弹性系数的前提下，最大应力减少了20%，为后续MEMS微弹簧的结构设计提供了参考。%Research on the MEMS microspring formerly was concentrated on the spring constant analysis,but few studies on the optimization design of the microspring were performed.The optimization method was adapted to perform the optimization design for the MEMS microspring.According to the advantage of the plane figure design,the line width optimization design of the L-shaped microspring was carried out by the fgoalattain func-tion of Matlab software to reduce the max stress.The simulation result showed that the relative 20% max stress reduction was gotten on condition that the dimension and the spring constant were assured.