为了研制恒压式气体微流量计,设计了以波纹管为主体的变容室,并对波纹管变容室截面面积进行了测量.采用多项式拟合公式对波纹管截面面积测量结果进行了修正,避免了波纹管非线性的影响,结果表明修正后偏差小于0.16％,截面面积的测量结果合成标准不确定度小于0.53％,可以满足使用要求.%For developing constant-pressure 1 gas micro-flow meter, the bellows variable volume chamber has been designed. And the section area has been measured. The section area value of bellow variable volume chamber is corrected by polynomial formula to avoid non-linearity effect of bellows. The corrected deviation is less than 0. 16% , and the relative combined standard uncertainty of measurement is less than 0.53%.
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