一种高灵敏度无线压力传感器的研究

摘要

为解决压力传感器在密闭空间、高旋、生物体内等不适用引线的问题,设计了一种无线压力传感器.对传感器进行原理分析及结构设计,采用MEMS工艺对硅片及BF33进行加工,并搭建了谐振频率-压力测试平台,对传感器性能进行测试.压力测试范围为5~105 kPa,在常温时的灵敏度为161.5 Hz/Pa,传感器具有较高的灵敏度,有利于提高压力检测精度.%In order to solve the problem that the pressure sensor is not suitable for the lead in the enclosed space and the liv-ing body,a wireless pressure sensor was designed.The principle of the sensor was analyzed and the structure was designed.The sil-icon and BF33 were processed by MEMS process.The performance of the sensor was tested by the resonant frequency pressure testing platform.The pressure test range is 5~105 kPa,the sensitivity is 161.5 Hz/Pa at room temperature,the sensor has high sensitivity,which is helpful to improve the accuracy of pressure measurement.