柔性铰链支撑式动镜的误差分析

摘要

Moving mirror scanning system based on the flexible hinge support was widely used in the portable and on?line Fourier transform infrared spectrometer.The subtle deformation of flexible hinge and moving mirror resulted in error in varying de?grees,when it was moving.To analyze the error of the system,a math model was built combined with modulation depth and the ini?tial phase.Result shows that dynamic perpendicularity error can seriously affect the quality of signal interference.And the round trip and speed of moving mirror are the influence factors.By optimizing design can reduce its affection.It also has reference signifi?cance to the production of moving mirror.%柔性铰链支撑式动镜系统广泛应用于便携式、工程在线测量的傅里叶变换红外光谱仪中.而在运动过程中,柔性铰链与动镜的微弱形变会给动镜引入不同程度的误差.通过建立数学模型,并结合调制度与初相位来分析系统存在的误差.结果表明:动镜的动态垂直度误差会严重影响信号干涉的质量,动镜行程、速度是其影响因素.可通过设计上的优化来减小其影响,对动镜的制作有借鉴意义.