机译:计划具有多种晶圆类型和驻留时间限制的双手臂群集工具
IEEESchool of Mechano-Electronic Engineering Xidian University Xi’an 710071 China;
IEEESchool of Mechano-Electronic Engineering Xidian University Xi’an 710071 ChinaSchool of Computer Science and Engineering College of Engineering Nanyang Technological University Singapore 639798 Singapore;
IEEESchool of Mechanical and Electrical Engineering Jiangxi University of Science and Technology Ganzhou 341000 China;
School of Computer Science and Engineering College of Engineering Nanyang Technological University Singapore 639798 Singapore;
School of Mechano-Electronic Engineering Xidian University Xi’an 710071 ChinaDepartment of Information Engineering Electrical Engineering and Applied Mathematics University of Salerno Fisciano 84084 Italy;
Cluster tools; multiple wafer types; scheduling; semiconductor manufacturing; wafer fabrication;