大功率光导开关硅微通道散热器设计与测试

摘要

因焦耳加热导致光导开关芯片温度升高并形成局部热点,影响了光导开关功率容量、重复频率和寿命的提高,因此需对光导开关进行主动冷却.设计了一种矩形微槽硅微通道散热器,其由散热器本体和盖板两部分组成,散热器本体上设有分流槽、矩形微槽阵列、汇流槽,盖板通过半导体刻蚀工艺形成通孔,两部分通过硅-硅键合工艺连接以形成闭合通道.以水为工质,实验测试了不同冷却工质流量、进口温度时微通道散热器的换热性能、温度均匀性和流体阻力,证明该微通道散热器在适中的冷却工质流量下具有较高的换热性能、较低的流体阻力和较好的温度均匀性,满足重复频率大功率光导开关的散热冷却需求.%Temperature rise and hot spot formation in photoconductive semiconductor switch(PCSS) chip caused by joule heating restrain the PCSS's power, repetition rate and lifetime, thus active cooling technology is necessary. In the paper, a high efficiency silicon rectangular micro-channel cooler is designed and experimentally tested. The cooler has two sections, principal frame and cover, joined by Si-Si bonding. The former section has an array of micro-channels between the distributary groove and the conflux groove, and the latter is punched by semiconductor etching technology. With water as coolant, the heat flux, temperature uniformity and fluid pressure drop at different coolant volumetric flow rate and inlet temperature are tested. The experimental results indicate that the cooler has a high heat transfer efficiency, low fluid pressure drop and good temperature uniformity at a moderate coolant volumetric flow rate. The silicon rectangular micro-channel cooler is applicable to high power repetitive PCSS chip cooling.