Surface Engineering and Precision Institute Cranfield University Cranfield MK430AL UK;
Centre for M6icro/Nano Manufacturing Technology(MNMT-Dublin) University College Dublin Dublin D04 V1W8 Ireland;
Centre for M6icro/Nano Manufacturing Technology(MNMT-Dublin) University College Dublin Dublin D04 V1W8 Ireland;
Manufacturing Technology Centre(MTC) Coventry CV79JU UK;
Key Laboratory of E&M Ministry of Education&Zhejiang Province Zhejiang University of Technology Hangzhou 310014 China;
Centre for Electronic Warfare Information and Cyber Cranfield University Shrivenham SN68LA UK;
Adtec Plasma Technology Co. Ltd. Fukuyama Hiroshima 712-0942 Japan;
microwave induced plasma; spectrum analysis; surface modification;