[1]Fraunhofer Institute for Mechanics of Materials IWM, Woehlerstr. 11, Freiburg 79108, Germany;
[1]Fraunhofer Institute for Mechanics of Materials IWM, Woehlerstr. 11, Freiburg 79108, Germany;
[2]Institute for Macromolecular Chemistry, University of Freibupg, Freiburg 79104, Germany;
[1]Fraunhofer Institute for Mechanics of Materials IWM, Woehlerstr. 11, Freiburg 79108, Germany;
[1]Fraunhofer Institute for Mechanics of Materials IWM, Woehlerstr. 11, Freiburg 79108, Germany;
[3]IMTEK- Department of Microsystems Engineering, University ofFreiburg, Georges-Koehler-Allee 103, Freiburg 79110, Germany;